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Custom-made Refractory 95 Alumina Ceramic Threaded Rod Nut for Semiconductor

Shengda Ceramic provides all kinds of alumina ceramics and engineering ceramics.

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Product Introduction

Product Overview

Our 95% alumina ceramic threaded rods and nuts are engineered specifically for semiconductor manufacturing equipment, offering superior chemical resistance, electrical insulation, and thermal stability in critical processing environments. These custom-made refractory ceramic components outperform metal alternatives in plasma etching, CVD, and wafer handling systems where contamination must be eliminated.

Key Product Advantages

1. Ultra-High Purity - 95% Al₂O₃ composition minimizes particle generation

2. Plasma-Resistant - Withstands aggressive semiconductor process gases

3. Non-Contaminating - Meets SEMI F47 standards for cleanroom use

4. Thermal Shock Resistant - Stable from -200°C to 1500°C

5. Custom Threading - Metric, UN, or special thread profiles available

6. Precision Machined - Tight tolerances (±0.01mm) for exact fit

Industry Applications

✔ Plasma Etching Systems

✔ CVD/Load Lock Components

✔ Wafer Handling & Inspection

✔ Ion Implantation

✔ Wet Process Equipment

$Custom-made Refractory 95 Alumina Ceramic Threaded Rod Nut for Semiconductor$

Why Choose Our Ceramic Products?

✅ Factory Direct Pricing - Eliminate middleman markups

✅ ISO-Certified Manufacturing - Consistent quality assurance

✅ Rapid Prototyping - 2-3 week lead time for samples

✅ Technical Expertise - 30+ years in advanced ceramics

✅ Global Logistics - Reliable worldwide shipping

Technical Parameters

Properties	Units	Cordierite Ceramic	Mullite Ceramic	95%Alumina Ceramic	99%Alumina Ceramic	Silicon Nitride	Zirconia Ceramic
Colour		Yellow	White	White	Light yellow	Black	White
Density	g/cm3	1.9	2.6	3.6	3.8	3.2	6
Flexural Strength	Mpa	30	120	300	350	800	1100
Compressive Strength	MPa	350	500	2500	2800	2600	3000
Modulus of Elasicity(20℃）	Gpa	40	100	300	350	290	320
Max Use Temperature	°C	1200	1300	1400	1500	1300	1050
Thermal Condutivity	W(m.K)	1.3-1.8	2~6	20	30	25	3
Thermal Expansion Cofficient	10-6/°C	2.5-3	2.5-3	7.5	8	3	10
Thermal Shock Resistance	△T℃	300	150	140	150	600	250
Dielectric Strength	KV/mm	-	-	15	18	14	15
Dielectric Constant	Er	8	8	9	9.2	9	26

Production process

1. Grind and crush the raw materials to be slurry or powder

2. se-different method to making the slurry or powder into semi-finished products

3. Put the semi-finished products into the kiln for dewaxing and sintering;

4. After forming and sintering, Ceramic Sleeves products can also be processed by subsequent CNC precision machining according to the drawing requirements. Then Q/C test.

5. Finally package Ceramic Sleeves by bubble paper or cartons and place it on tray for delivery

95 alumina substrate

Certifications

95 alumina substrate

Packaging and shipping

95 alumina substrate

FAQ

Q: Do you have the products in stock?

A: Some standard produce have in stock, such as ceramic band heater insulator; bobbin heater insulator and ceramic connector. But it needs to check according to your requirement.

Q: How do you pack the goods?

A: Our standard packaging is carton, we can customize it as per your requirement as well.

Q: How many days do you finish the sample?

A: Usually 15 business days (Including 8days for making furnaces and 7days for producing samples)

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